Application of a Bias-Current Modulation Technique to Radio-Frequency Glow Discharge Optical Emission Spectrometry.
نویسندگان
چکیده
منابع مشابه
Effect of the driving frequency on the emission characteristics of a radio-frequency glow discharge excitation source boosted by the introduction of a d. c. bias current.
In a radio-frequency-powered glow discharge lamp, a d.c. bias current which is driven by a self-bias voltage can lead to an enhancement of the emission intensities excited by the plasma. The driving frequency of the r.f. plasma is an important parameter to determine the self-bias voltage; lower r.f. frequencies induce greater self-bias voltages. The effects of the bias current introduction on t...
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متن کاملExcitation processes in introduction of bias current to a radio-frequency glow discharge plasma evaluated from Boltzmann plots of iron atomic and ionic spectral lines.
A DC current, which was driven by the self-bias voltage, could be conducted in a radio-frequency-powered glow discharge plasma by connecting a low-pass filter circuit and a load resistor with the discharge tube. This current enhanced the intensity of emission spectra from the plasma largely. The intensities of iron atomic lines increased 35 - 50 times, whereas the sputtering rate was not chan...
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ژورنال
عنوان ژورنال: Analytical Sciences
سال: 1999
ISSN: 0910-6340,1348-2246
DOI: 10.2116/analsci.15.517